Process Variations in Microsystems Manufacturing
Produktnummer:
1809158e1bf6d44af8a0b374813a65ea5e
| Autor: | Huff, Michael |
|---|---|
| Themengebiete: | MEMS Micro-Electro-Mechanical Systems Micro-machining Microactuators Microsensors Microsystems Microsystems Design Microsystems Manufacturing |
| Veröffentlichungsdatum: | 10.04.2020 |
| EAN: | 9783030405588 |
| Sprache: | Englisch |
| Seitenzahl: | 521 |
| Produktart: | Gebunden |
| Verlag: | Springer International Publishing |
Produktinformationen "Process Variations in Microsystems Manufacturing"
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
Sie möchten lieber vor Ort einkaufen?
Sie haben Fragen zu diesem oder anderen Produkten oder möchten einfach gerne analog im Laden stöbern? Wir sind gerne für Sie da und beraten Sie auch telefonisch.
Juristische Fachbuchhandlung
Georg Blendl
Parcellistraße 5 (Maxburg)
8033 München
Montag - Freitag: 8:15 -18 Uhr
Samstags geschlossen